With the requirement for highest cleanliness of carriers, boxes, SMIF-pods and FOUPs as well as maximum flexibility for the customer - the two cleaners have been part of the AP&S portfolio for years.
Reliable, practical and compact - this is how the tools can be described in summary. Thanks to a smart fixture system, which is characteristic for all AP&S cleaners, all types of wafer carriers and boxes can be cleaned in one tool. The adaptation to the loading with different types of boxes happens in the twinkling of an eye. The loading capacity is also convincing with up to 8 sets of standard 4"- 8" carriers and boxes on the CBII and up to 16 sets of standard 4"- 6" carriers and boxes or up to 8 sets of SMIF or FOUP/FOSB on the CBIII. Fast loading, attractive TCO values and short process times support efficient chains in semiconductor manufacturing. A practical gate function between gray room and clean room is another advantage of the cleaners.