Cleaner for the semiconductor production

Optimum particle and AMC removal on carriers, boxes, SMIFs and FOUPs

CleanSurF® - the new AP&S cleaner ensures maximum cleanliness in accordance with highest purity standards to secure the process chains in semiconductor manufacturing and ensure maximum productivity.

In product development, the following were the key points for us: we wanted to develop a cleaner according to the latest technical standard, which enables both manual and automatic loading and convinces with high loading capacity. With our new CleanSurF®, we have achieved our goal to realize a cleaner with efficient throughput and attractive TCO.

Tobias Bausch, CMO & CTO at AP&S

Optimum cleaning results

The newly developed nozzle concept enables flexible, 360-degree, separately controllable handling of the nozzles. More than 50 nozzles (DIW as well as N2 nozzles) are installed in the tool and ensure particle and AMC (airborne molecular contamination) removal performance and shorter cleaning times.

Attractive TCO values

The cleaner convinces with a low water and nitrogen consumption as well as with the very compact footprint of 3 square meteres. 

High loading capacity

Loading capacity of up to 12 x 12 inch FOUPs per run at optimized recipe time. 

Latest software technology

Latest software technology including HMI according to Semi II standard guarantees maximum process reliability. Convenient and simple system handling is achieved via an user-friendly monitoring. This includes a wide range of features like schematic display of the process chamber, of process values and active spray elements, as well as simple recipe management and a wide range of export functions.

Maximum flexibility

The tool concept is optimized for manual and automatic loading. It handles all common types of boxes, carriers, FOUPs and SMIFs, which are used in the semiconductor production. 

Practical gate function

Loading on the cleanroom side and access to the service area on the grayroom side means that valuable cleanroom space can be saved. As an option, a second process chamber door allows a gate function to separate the cleanroom from the grayroom.


Sales Team

+49 771 8983-0